Axis |
Range |
Resolution |
Repeatability |
Bragg Angle DC Servo motor driven with speeds of several °/sec |
as required |
0.16μrad /encoder step |
±0.5μrad |
2nd crystal gap Translates 2nd crystal perpendicular to 1st crystal surface, used to maintain fixed offset |
as required |
0.25μm /full step |
±0.3μm |
2nd crystal coarse pitch Stepper motor driven |
±1° |
0.55μrad /half step |
±0.5μrad |
2nd crystal fine pitch Piezo driven |
400μrad |
<50nrad |
<<1μrad |
2nd crystal coarse roll Stepper motor driven |
±1° |
0.53μrad /half step |
±0.4μrad |
2nd crystal fine roll Piezo driven |
400μrad |
<50nrad |
<<1μrad |
Horizontal crystal exchange |
as required |
0.5μm /full step |
±0.13μm |