Long 156mm travel slide motion performance |
|
Resolution |
1.5μm |
Repeatability |
0.1μm |
Parasitic angular data obtained with laser autocollimator |
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Test range |
Pitch repeatability |
Yaw repeatability |
Pitch range |
Yaw range |
0- |
±0.9μrad |
±0.6μrad |
50μrad |
24μrad |
Parasitic straighness data obtained with Faro arm cmm |
||
Test range |
Z range |
Y range |
0- |
±13μm |
±16μm |