Axis |
Range |
Resolution |
Repeatability |
Coarse Pitch Stepper motor driven |
±1° |
1.14μrad |
±0.7μrad |
Fine Pitch Piezo driven |
400μrad |
<50nrad |
<<1μrad |
Coarse Roll Stepper motor driven |
±1° |
1.30μrad |
±1.4μrad |
Horizontal X Translation |
±2mm |
0.1μm |
±1.6μm |