Axis |
Range |
Resolution |
Repeatability |
Notes |
In- |
- R=∞ to <1km |
0.17μm <0.01%R |
Typically <1%R @R=5km |
Independent actuators provide differential moment to achieve ideal elliptical profile |
Axis |
Range |
Resolution |
Repeatability |
Notes |
Vertical translation & Pitch Angle |
100mm ±1° |
0.4μm 0.04μrad |
0.3μm <1μrad |
Through vacuum linear actuators control vertical position & pitch |
Horizontal translation |
50mm |
0.3μm |
<2μm |
2 actuators driven simultaneously |
Yaw angle |
±10mrad |
0.3μrad |
<5μrad |
Actuators driven in opposite direction |
Axis |
Range |
Resolution |
Repeatability |
Notes |
Horizontal translation & Pitch Angle |
100mm ±1° |
0.4μm 0.04μrad |
0.3μm <1μrad |
Through vacuum linear actuators control horizontal position & pitch |
Vertical translation (height) |
50mm |
0.3μm |
<2μm |
3 jacks (simultaneously) control height |
Roll angle |
±20mrad |
0.8μrad |
<5μrad |
1 jack controls roll |
Yaw angle |
±10mrad |
0.3μrad |
<5μrad |
3 jacks (differentially) control yaw |