Axis |
Range |
Resolution |
Repeatability |
Bragg Stepper / rotary table driven |
<0° to 30° |
1.75rad |
0.2μrad |
2nd crystal Coarse Pitch Stepper motor driven |
±0.7° |
0.73μrad |
0.6μrad |
2nd crystal Fine Pitch Piezo driven |
80μrad |
<50nrad |
<<1μrad |
2nd crystal Coarse Roll Stepper motor driven |
±1° |
1.12μrad |
0.4μrad |
2nd crystal Fine roll Piezo driven |
125μrad |
<50nrad |
<<1μrad |
2nd crystal gap Used to maintain offset |
3mm |
0.2μm |
0.5μm |