Axis |
Range |
Resolution |
Repeatability |
Bragg Angle Direct drive motor |
as required |
Encoder resolution <0.08μrad |
±0.20μrad |
2nd crystal gap Translates 2nd crystal perpendicular to 1st crystal surface, used to maintain fixed offset |
as required |
0.1μm / half step |
±0.20μm |
2nd crystal coarse pitch Stepper motor driven |
±1° |
0.45μrad / half step |
±0.26μrad |
2nd crystal fine pitch Piezo driven |
320μrad |
<50nrad |
<<1μrad |
2nd crystal coarse roll Stepper motor driven |
±1° |
0.63μrad / half step |
±0.33μrad |
2nd crystal fine roll Piezo driven |
450μrad |
<50nrad |
<<1μrad |
Horizontal crystal exchange Entire air- |
as required |
<5μm |
±1μm |